http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110025169-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2009-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46a0ab9bd0047a748aa9ee8858437ea6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5f7ed3fab226830ef690ea6d8ae2dae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bda41d18b7b29284dc78fc1b59780104 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d901ef23866a83cfea947fb91ae6cb0c |
| publicationDate | 2011-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110025169-A |
| titleOfInvention | Cylindrical sputtering target and manufacturing method thereof |
| abstract | The present invention provides a ceramic cylindrical sputtering target that significantly reduces the occurrence of cracking, dropping, abnormal discharge and nodule. The cavity formed by the ceramic cylindrical target material and the cylindrical base material is filled with a molten bonding material, cooling is started at one end in the cylindrical axis direction, cooled sequentially to the other end, and further bonded in the molten state during cooling. By supplying the cavity to the cavity, the total area of the portion where no bonding material is present in the X-ray transmission photograph of the bonding material is 10 cm 2 or less per 50 cm 2 of X-ray transmission photograph, and the maximum area of the portion where the bonding material does not exist is 9 cm 2 The ceramic cylindrical sputtering target characterized by the following is manufactured. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140057213-A |
| priorityDate | 2008-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.