http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110025130-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-303 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0384 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a20104ecee0ec4bcd8f7e4cf2aa6743 |
| publicationDate | 2011-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110025130-A |
| titleOfInvention | Method for producing compound, resin, resist composition and resist pattern |
| abstract | The compound of this invention represents the compound represented with the following general formula (A). In the formula, R 1 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms; Z 1 represents a single bond, -CO-O- * or -CO-O- (CH 2 ) k -CO-O- *; Z 2 is a single bond, * -O-CO-, * -CO-O-, * -O- (CH 2 ) k -CO-, * -CO- (CH 2 ) k -O-, * -O- (CH 2 ) k —CO—O—, * —O—CO— (CH 2 ) k —O— or * —O—CO— (CH 2 ) k —O—CO—; k represents an integer of 1 to 6; * Represents a bond with W; W represents a C4-C36 (n + 1) valent alicyclic hydrocarbon group or a C6-C18 (n + 1) valent aromatic hydrocarbon group, and at least one hydrogen atom contained in the alicyclic hydrocarbon group and the aromatic hydrocarbon group is a halogen atom, carbon number Or an alkyl group of 1 to 12, an alkoxy group of 1 to 12 carbon atoms, an acyl group of 2 to 4 carbon atoms, or a -OR 10 group; R 10 represents a hydrogen atom or a group represented by the formula (R 2 -2); R 2 represents a hydrogen atom, a group represented by formula (R 2 -1) or a group represented by formula (R 2 -2); n represents an integer of 1 to 3; R 4 , R 5 and R 6 each independently represent a hydrocarbon group having 1 to 12 carbon atoms; R 7 and R 8 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R 9 represents a hydrocarbon group having 1 to 14 carbon atoms. |
| priorityDate | 2009-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 253.