| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf213be03285a0b93967ae2fd2fd351a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-04 |
| filingDate |
2009-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db14cc5fccfc110893ec463030f58053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_143514d41601b374d38e15bce8fcca1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f3ed913a3066b7675ac9cf3d8d56e04 |
| publicationDate |
2011-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110024393-A |
| titleOfInvention |
Polishing pads containing nanofibers with protrusions |
| abstract |
The present invention relates to a polishing pad containing nanofibers having protrusions, in particular nanofibers having protrusions and coating layers formed on surfaces thereof; And it provides a polishing pad comprising a matrix containing the nanofibers therein. The polishing pad of the present invention can produce a slurry to which the abrasive is not added, thereby significantly reducing the scratch occurrence rate due to the aggregation of the abrasive. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103770027-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103831735-A |
| priorityDate |
2009-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |