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filingDate 2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110021686-A
titleOfInvention Improved Method for Forming Nickel Silicide
abstract The silicon containing substrate is coated with nickel. Nickel is coated with a protective layer, and the combination is heated to a sufficient temperature to form nickel silicide. The formation of nickel silicide can be carried out in an oxygen containing environment.
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