http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110017974-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37eb7cfa3558a58bbb336dd2190e210a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate | 2009-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20e6b99d1a6894ab55fe3e33e847f250 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28e9f208467ae6e43637bb27e9dc5d2e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_149d71db356e03232436efefd8682e87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e5f3e76946578b68f69ee50bb5a8f44 |
| publicationDate | 2011-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110017974-A |
| titleOfInvention | Wet etching composition of silicon oxide film |
| abstract | The present invention relates to a silicon oxide film etching composition capable of selectively removing the silicon oxide film with respect to the silicon nitride film at a high etching rate, specifically 1 to 40% by weight of hydrogen fluoride (HF), ammonium hydrogen fluoride (NH 4 HF 2 ) 5 to 40% by weight and water, and relates to the wet etching composition of the silicon oxide film further comprises a surfactant to improve the selectivity of the silicon oxide film and silicon nitride film.n n n The silicon oxide wet etching composition according to the present invention has high silicon oxide etching selectivity with respect to the silicon nitride film, and is useful for selectively removing the silicon oxide film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150050279-A |
| priorityDate | 2009-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.