http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110012574-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9daca98ac07d1c93234d13f7306addb
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-544
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08
filingDate 2009-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_572779b8611b878878126f386cf87915
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4f476258f663270e840b5be0934dcc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb9329888a0f44e9744bb43d0b687b3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e138bb85f887329b1887ffac3732624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbc38468b71ccbc60794f57bf35340dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f7356da77e5914cbcfc4432a105ce69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0be76b5d81410bd585fe3aa94b610173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4809b7d7450f330f44b8fcbdae040ea4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc8b41e658e38b263559f2c56456cb05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2798bac3dd4d55b9f2e5068f3c4887ad
publicationDate 2011-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110012574-A
titleOfInvention Polysilazane composition comprising aminosilane
abstract The present invention relates to a polysilazane composition for forming a film containing polysilazane and aminosilane. In detail, the present invention provides a polysilazane composition capable of forming an excellent silica film as a material of an electronic device such as an interlayer insulating film, a dielectric film, a planarization film, a passivation film, and an interlayer isolation insulator.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018517790-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10093830-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9890255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10427944-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020185-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113174198-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016169631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104684968-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170138408-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10106687-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10875969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107532003-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103172653-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I702251-B
priorityDate 2009-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10877046
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452350267
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558802
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID356
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457277700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450009255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7044
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8127
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8079
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8078
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426453095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588230
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410492264
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425413332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15600
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4398339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447679852
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486329
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525513
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513069
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8900
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8657
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544127
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8058
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424436622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431641905
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10686
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546450
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19463
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8102
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415723387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487106
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13463714
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8085
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410486680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410389413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410569088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451271204
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456922693
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408721192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510216
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12219
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6558
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508302
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484729
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123213407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559219
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411279684
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486030
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10290728
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID39149
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524931
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410564906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7892
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486926
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10964401
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420233562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451617560
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8909
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557953
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23696329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11446288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448220093
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7519
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488277
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410493944
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12348
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12438652
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14094712
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15504
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408834051
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517952
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415836895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10898668
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517945
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488112
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13460889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447550105
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8920
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451959763
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410519838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5152226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454175569
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526444
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137752
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1140
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7237
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8038
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8114
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13119525
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521664
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535582
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8003
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6385
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12605453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31276
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451631945
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13492682
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526596
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57370846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414806696
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8108
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID30889
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8143
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411135244
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID298631
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450861925
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11137085

Total number of triples: 175.