http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110009886-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_87c69aa5e65ae00c73cfdf90a68290d4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
| filingDate | 2009-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c1eaf988e534e81604d22c8e532e088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d59bb118f366baf6a2d6c3ddbd748ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdf863b433d09b2fd46b057c67826daa |
| publicationDate | 2011-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110009886-A |
| titleOfInvention | Electric field nanoimprinting method |
| abstract | The present invention relates to a method for improving replication efficiency by applying an electric field by improving a micro / nanoimprinting method. The electric field nanoimprinting method consists of two steps: first, applying an electric field to the liquid polymer under the object of replication, and curing the polymer to which the electric field is applied. According to the nanoimprinting method to which the electric field was added, the imprinting efficiency improved by 45% compared to that produced by the conventional nanoimprinting. The nanoimprinting method with the addition of an electric field has significantly improved the quality of conventional nanoimprinting. |
| priorityDate | 2009-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.