http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110003734-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b869514a94738bc919240f1ff24b0bd |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0466 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2889 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2863 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2009-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0d237553a5bd9bbf9cb4b43a5f4b6a6 |
| publicationDate | 2011-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110003734-A |
| titleOfInvention | Method of manufacturing the intermediate member and the intermediate member manufactured by the method |
| abstract | The present invention provides a manufacturing method for producing an intermediate member, a mold preparation step; Magnetic body preparation step; Batching step; Filling step; And an alignment step; but the preparing of the magnetic body part includes:n n n An application step of applying a resist to the surface of the substrate; A film mounting step of mounting a mask film having a through hole formed at a position corresponding to the conductive portion on the resist; An exposure step of shining ultraviolet rays on the mask film; A film removing step of removing the mask film; A developing step of removing a portion of the resist exposed to ultraviolet rays; And a first plating step of plating the surface of the substrate with a magnetic material to form a magnetic layer on a portion where the resist is removed. A resist removal step for removing the remaining resist and the plating layer formed on the resist in the first plating step; A second plating step of plating a surface of the substrate with a nonmagnetic material to form a nonmagnetic layer on the resist portion removed in the resist removing step; And a CMP step of surface-treating to remove the nonmagnetic layer formed on the magnetic layer, and the intermediate member manufactured by the method.n n n n Medium member, conductive part, sheet, exposure, development, plating |
| priorityDate | 2009-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.