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publicationDate 2011-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110002004-A
titleOfInvention Manufacturing Method of Wire Grid Polarizer
abstract The present invention provides a method for easily manufacturing a wire grid polarizer that exhibits high polarization separation ability in the visible light region and has improved transmittance in the short wavelength region. The base layer 22, the first metal thin wire 24, and the second metal thin wire 30 satisfy the conditions (A) to (F) on the transparent substrate 14 having the plurality of protrusions 12 formed on the surface thereof. It is formed by vapor deposition. (A) The base layer material is deposited on the upper surface 16 and the first side surface 18 of the protrusion 12 from the direction of forming the angle θ L. (B) The base layer material is deposited on the upper surface and the second side surface 20 of the first base layer 22a from the direction of forming the angle θ R opposite to the condition (A). (C) θ L and θ R are 60 ° to 90 °. (D) The height Hma1 of the base layer 22 shall be 1-20 nm. (E) A metal or a metal compound is deposited on the upper surface of the base layer 22 and the bottom surface 28 of the grooves 26. (F) The height Hma2 of the first metal thin wire 24 and the height Hp of the protrusion are 40 nm Hma2 0.9 × Hp is satisfied.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101867192-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160042146-A
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