| abstract |
The present invention relates to silsesquioxane resins consisting of the following units, useful for antireflective coatings: (Ph (CH 2 ) r SiO (3-x) / 2 (OR ") x ) m (HSiO (3-x) / 2 (OR ") x ) n (MeSiO (3-x) / 2 (OR ") x ) o (RSiO (3-x) / 2 (OR ") x ) p (R 1 SiO (3-x) / 2 (OR ") x ) q Wherein Ph is a phenyl group; Me is a methyl group; R ″ is a hydrogen atom or a hydrocarbon group having 1 to 4 carbon atoms; R is selected from hydroxyl generating groups; R 1 is a substituted phenyl group, ester group, polyether group; mercapto group, and reactive Or a curable organic functional group; r has a value of 0, 1, 2, 3 or 4; x has a value of 0, 1 or 2; m has a value of 0 to 0.95; n is 0.05 From 0 to 0.95; o has a value from 0 to 0.95; p has a value from 0.05 to 0.5; q has a value from 0 to 0.5; m + n + o + p + q is approximately 1 . |