| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a9c8be5926503f1c3cb4dbcce92afd13 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-4529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-542 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2009-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b014ab2e43821e36703e0c38d857d52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da954f657ab228c906aac82ee4055acd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0f8250cc2581fb8f85cadd75280d4df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bd8704a04eaa0fc50cc50ca2978fcea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6089dac1725063cea19bef76c2c2ed93 |
| publicationDate |
2010-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100131306-A |
| titleOfInvention |
Plasma-resistant electron beam evaporation ceramic coating member and apparatus for manufacturing same |
| abstract |
Disclosed is an electron beam deposition ceramic coating member which can prevent the peeling phenomenon of the top coat and improve durability in a high density plasma environment.n n n The electron beam deposition ceramic coating member according to the present invention is characterized in that an electron-beam deposition film of a ceramic material is coated on a surface of a ceramic substrate as a ceramic top coat. At this time, in order to alleviate the difference in thermal expansion coefficient between the ceramic top coat and the ceramic substrate, an intermediate layer textured with alternating or concentration gradient forms is formed below the ceramic top coat. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170021103-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020170-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587771-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10563297-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020116384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020116384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113260732-A |
| priorityDate |
2009-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |