| abstract |
Salts represented by formula (I-BB) are disclosed: Here, Q 1 and Q 2 each independently represent a fluorine atom or the like, X 1 represents a single bond or the like, Y 1 represents a C1-C36 aliphatic hydrocarbon group or the like, A 1 and A 2 each independently represent a C1-C20 aliphatic hydrocarbon group or the like, Ar 1 represents a (m 4 +1) -valent C6-C20 aromatic hydrocarbon group which may have one or more substituents, B 1 represents a single bond or the like, B 2 represents a C4-C36 alicyclic hydrocarbon group having at least one -OX a group and cannot be removed by the action of an acid, X a represents a group or a hydrogen atom that can be removed by the action of an acid, m 1 and m 2 each independently represent an integer of 0 to 2, m 3 represents an integer of 1 to 3 provided that m 1 + m 2 + m 3 = 3, and m 4 represents an integer of 1 to 3 Indicates. |