| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1818
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0275 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2009-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5b7a149c361839c35b42ecc750a84c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22ef790308dd6f424767c9679eac5aa2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c85d1a8e6e004ca956fd508f2ea575cd |
| publicationDate |
2010-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100126734-A |
| titleOfInvention |
Monomers, high molecular compounds and photoresist compositions comprising a lactone skeleton |
| abstract |
The present invention is excellent in solubility in organic solvents and can be improved in solubility in water after hydrolysis and / or hydrolysis while maintaining stability such as chemical resistance when applied to a resin for resist. A monomer comprising a novel lactone skeleton useful as a monomer component and the like is provided. Moreover, it is related with the monomer containing the lactone frame | skeleton represented by following formula (1). <Formula 1> (Wherein R a represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a substituent, R 1 represents a group having a lactone skeleton, and Y represents a divalent organic group having 1 to 6 carbon atoms). ) |
| priorityDate |
2008-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |