| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-0655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D251-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a7a05658647669e8a5cead067a116f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc9a29ba90b9f3443d76acddd56968c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e63a38b83b7e62e74b7982d27f2b9d51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9fbb3868b832970980028799f9e6ec2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5b90ed5673cb18ca2843cf8f1dd8af1 |
| publicationDate |
2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100125196-A |
| titleOfInvention |
Coating Compositions for Use with Overcoated Photoresist |
| abstract |
A cyanurate composition is provided that is particularly useful as a reagent for forming the resin component of the coating composition that is placed underneath the overcoated photoresist. Preferred isocyanurate compounds include the substitution of a plurality of cyanurate nitrogen ring atoms by at least two separate carboxy and / or carboxy ester groups. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11493845-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150076604-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11435667-B2 |
| priorityDate |
2009-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |