http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100124672-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1811 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00 |
| filingDate | 2010-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d292904b92dd2b1563d20c9f4ee829c2 |
| publicationDate | 2010-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100124672-A |
| titleOfInvention | Manufacturing method of polymer compound for photoresist |
| abstract | The present invention provides a polymeric compound for photoresists with very low metal content, especially sodium and iron content. The manufacturing method of the polymeric compound for photoresists of this invention contains the monomer (a) containing the group which becomes alkali-soluble by the acid desorption, the monomer (b) containing a lactone skeleton, and the alicyclic skeleton which has a hydroxyl group. A solution containing a polymer obtained by polymerizing a monomer mixture comprising at least one monomer selected from monomers (c) is passed through a filter composed of a porous membrane having an anion exchange group, and then to a filter composed of a porous membrane having a cation exchange group. It includes the step of passing the liquid. It is preferable that the metal content in the polymer solution passed to the filter comprised by the porous membrane which has a cation exchanger is 1000 weight ppb or less with respect to a polymer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011051338-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170038046-A |
| priorityDate | 2009-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 206.