| abstract |
The present invention, but the deposition flexible (Flexible) relates to a substrate processing method of the display, a transparent electrode in an OLED element using a plastic (Plastic) substrate ITO film No. 2, a first thin deposition to claim 1 ITO, and then O 2 plasma ( Plasma) to enhance the adhesion of the surface of the plastic substrate and the first ITO, and then re-deposit the second ITO on top of it, greatly improving the adhesion between the plastic substrate and the ITO film, thereby greatly improving the characteristics of the OLED device. It was made possible. |