| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2009-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b188dd5c0e47c0e80cbbcf3ceade410
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_957ef0b677d29ee7a61ef8c0af8d1d30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_099904b8028bc7bfbacb479230eba164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9259ed7780be1cec8d9675f6f1eca81d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53b964925ee24e83c5a7d3b566c057bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_185a59569550cc953146c98b8101ca54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b891f6dcc2f3c1769c00f7b2f668e63e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51875524e3cae02ae000320ae9aba0e7 |
| publicationDate |
2010-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100123678-A |
| titleOfInvention |
Aqueous dispersions for chemical mechanical polishing and chemical mechanical polishing methods |
| abstract |
The chemical mechanical polishing aqueous dispersion according to the present invention is a chemical mechanical polishing aqueous dispersion containing (A) silica particles and (B1) organic acid, wherein the (A) silica particles have a specific surface area measured using the BET method. And a silanol group density calculated from the amount of silanol groups measured by titration of 1.0 to 3.0 / m 2. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160063320-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170074869-A |
| priorityDate |
2008-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |