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publicationDate 2010-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20100121676-A
titleOfInvention Microelectromechanical devices with thermal expansion balance layers or rigid layers
abstract In an interferometric modulator, a thermal expansion balance layer is formed on one side of the movable flexible layer on the opposite side of the movable reflector so that the distance between the movable reflector and the optical stack does not change significantly when the temperature changes, thereby inducing a stable color. have. Further, in the interferometric modulator, a rigid layer is formed between the movable flexible layer and the movable reflector, and at least one hollow portion exists on the surface where the movable reflector and the rigid layer contact each other, so that the movable reflector is prevented from bending. By becoming more rigid with respect to it, the temperature sensitivity of the movable reflector is reduced.
priorityDate 2008-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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