| abstract |
The device has a liner installed on the face of the vacuum chamber. The components of the vacuum chamber define the plane. The liner is configured to protect the workpiece from contamination and to prevent blistering of the face caused by the injection of atoms or ions into the face. In some embodiments, the liner may be disposable, removed from the face of the vacuum chamber, and replaced with a new liner. In some embodiments, this liner may be a polymer with an uneven surface, carbon-based, or made of carbon nanotubes. |