Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b31896b0595e5629c470c80b74b2d2e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate |
2009-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a48b5e2ddab6b93e080ca9ada14e3ca3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea656caf786edfe8c238951af76af47e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ce553dedc07868504004aa647b5438f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09a94ae38a4b2f66d1d76ec0ac43589f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87d4569eb6f9af6247d8211ba52e0715 |
publicationDate |
2010-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20100120974-A |
titleOfInvention |
Formation method of inorganic layer |
abstract |
A method of forming an inorganic layer is disclosed. The disclosed method of forming an inorganic layer may include changing an inorganic source layer by annealing the source layer of the inorganic material with a laser. The source layer may be in a semisolid state. The source layer may be patterned prior to the annealing, for example by electrohydrodynamic lithography (EHL). |
priorityDate |
2009-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |