| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D339-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D339-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D339-08 |
| filingDate |
2009-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f00c61a70acfc5e60c565ba7046a1e3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52b29d6ee649e6feee5814b02363bc37 |
| publicationDate |
2010-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100120649-A |
| titleOfInvention |
Method for producing acrylate ester derivatives and acrylate ester derivatives and intermediates thereof |
| abstract |
1) A photoresist composition which is excellent in reactivity with acid and thermal stability, has a small swelling during development, and can form a photoresist film having a refractive index of preferably at least 1.72 at a wavelength of 193 nm. A method for producing the following acrylate ester derivative, which can be used as a raw material of a high molecular compound for obtaining a photoresist composition, 2) the following acrylate ester derivative obtained by the production method, and 3) a synthetic intermediate of the acrylate ester derivative Alcohols and esters are provided. |
| priorityDate |
2008-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |