http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100118099-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-029
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
filingDate 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_192f9c30668b3d5f4b7041bc6ff7052d
publicationDate 2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20100118099-A
titleOfInvention Dicing method
abstract The dicing apparatus according to one aspect of the present invention also applies to the workpiece placed on the second work table on the first work table during imaging with the first imaging means and the second imaging means. When the control means detects that the first imaging means and the second imaging means need to image, the control means prioritizes the operations performed by the first work table and the second work table. And the imaging of the workpiece placed on the second work table is interrupted when it is determined that the operation priority in the first work table is high, and the first imaging means and the first It is characterized by imaging the workpiece | work on the said 1st work table by moving 2 imaging means.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170063379-A
priorityDate 2007-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 17.