http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100118099-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-029 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
filingDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_192f9c30668b3d5f4b7041bc6ff7052d |
publicationDate | 2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20100118099-A |
titleOfInvention | Dicing method |
abstract | The dicing apparatus according to one aspect of the present invention also applies to the workpiece placed on the second work table on the first work table during imaging with the first imaging means and the second imaging means. When the control means detects that the first imaging means and the second imaging means need to image, the control means prioritizes the operations performed by the first work table and the second work table. And the imaging of the workpiece placed on the second work table is interrupted when it is determined that the operation priority in the first work table is high, and the first imaging means and the first It is characterized by imaging the workpiece | work on the said 1st work table by moving 2 imaging means. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170063379-A |
priorityDate | 2007-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.