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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0392
filingDate 2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f7250b2336a610ae2c7ae929dcd51b2
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publicationDate 2010-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20100112260-A
titleOfInvention Novel indium alkoxide compound and preparation method thereof
abstract The present invention relates to a novel indium alkoxide compound having a different alkoxide represented by the following formula (1) as a ligand and a method for preparing the same.n n n [Formula 1]n n n In [OA-NR 1 R 2 ] x [OR 3 ] 3-x n n n [In Formula 1, A is alkylene of one or more C 1 -C 5 linear or branched alkyl group that is substituted or unsubstituted with C 2 -C 5 in which p is 1 to 100; R 1 to R 3 are each independently a C 1 -C 5 linear or branched alkyl group;n n n x is an integer of 1 or 2.]n n n The indium alkoxide compound according to the present invention is an indium precursor, which is in a liquid state at room temperature and has a high vapor pressure, and thus may be usefully used as an indium raw material for thin film deposition or various alloy deposition of indium-containing materials.
priorityDate 2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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