| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C323-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-65 |
| filingDate |
2010-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_185c2b7211c15b88099dedf95d2b730f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a988f3fec52dd71e838f0c20ad819dc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 |
| publicationDate |
2010-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100108233-A |
| titleOfInvention |
Sulfonium compounds |
| abstract |
The present invention provides sulfonium compounds represented by formula (la): Where Q 1 and Q 2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R 1 represents a C5-C42 organic group having a β-ketoester structure, and A + represents an organic counter ion And a chemically amplified photoresist composition comprising the aforementioned sulfonium compound and a structural unit having an acid-labile group, wherein the resin comprises a structural unit that is insoluble or poorly soluble in aqueous alkali solution but soluble in aqueous alkali solution by the action of acid. to provide. |
| priorityDate |
2009-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |