http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100106994-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2008-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_085f614b802f4cae63c8bdf8d32616bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28982cb9d17a6325514c4e90fb431d56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c8951b2ab238cbe6a476f3a7b416034 |
| publicationDate | 2010-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100106994-A |
| titleOfInvention | Copper-passivated CPM compositions and methods |
| abstract | The present invention is directed to chemical-mechanical polishing (CMP) methods and compositions for polishing copper-containing substrates. The process of the invention involves polishing the surface of a copper-containing substrate with the CMP composition of the invention, preferably in the presence of an oxidizing agent (eg hydrogen peroxide). The CMP composition of the present invention comprises a particulate abrasive, a copper-complexing agent, a copper-passivating agent comprising an acidic OH group and additional oxygen substituents in a 1,6 relationship to the oxygen atom of the acidic OH group, and an aqueous carrier. do. Preferred compositions of the present invention comprise 0.01 to 1% by weight particulate abrasive, 0.1 to 1% by weight copper-complexing agent, and 10 to 1000 ppm copper-passivating agent. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140047015-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180123167-A |
| priorityDate | 2007-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.