| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 |
| filingDate |
2009-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45b290f4a4f9992196dcae7d2bfb343c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e0305729cc4c00007faf3964fd849b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de18c97b114b1d78198934f0aeb582e4 |
| publicationDate |
2010-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100102227-A |
| titleOfInvention |
Surface treatment apparatus and surface treatment method |
| abstract |
The aqueous solution containing the adhesion promoter of 20% by volume or more is heated and vaporized to a temperature of 80 to 100 ° C. to generate a water-containing adhesion promoter vapor. The water-containing adhesion promoter vapor is adhered to and condensed on the surface of the substrate, followed by heating dehydration. A reaction is generated to adhere the adhesion promoter to the surface of the substrate. |
| priorityDate |
2008-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |