Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate |
2009-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40dcf6ff094e42baf16e0eec03443e75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88ee237348ddf794ea55454180289a13 |
publicationDate |
2010-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20100102144-A |
titleOfInvention |
Heteroaromatic photoacid generators free of fluorine and photoresist compositions containing them |
abstract |
Photoresist compositions containing fluorine-free photoacid generators and fluorine-free photoacid generators are possible as substitutes for PFOS / PFAS photoacid generator-containing photoresists. Photoacid generators are characterized by the presence of a heteroaromatic sulfonate anion component that does not contain fluorine. The photoacid generator preferably contains an onium cation component, more preferably a sulfonium cation component. The photoresist composition preferably contains an acid sensitive imaging polymer. The composition is particularly useful for forming material patterns using 193 nm (Arf) imaging radiation. |
priorityDate |
2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |