http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100088525-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-1055 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0385 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 2009-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9a9c4596ed404a4ab04eef308be229b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d072f1629ca27adc6324af88e2d27d91 |
publicationDate | 2010-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20100088525-A |
titleOfInvention | Positive resist composition and method of forming resist pattern using same |
abstract | In order to form a fine resist pattern, while providing good adhesion between the resist film and the substrate, a positive resist composition capable of reducing the occurrence of residue after development of the resist film and a method of forming a resist pattern using the same are provided. It is.n n n Solution (A) A positive resist composition containing an alkali-soluble novolak resin, (B) photosensitive agent and a predetermined (C) benzotriazole-based compound contains a predetermined benzotriazole-based compound, so that the adhesion between the resist film and the substrate It can be maintained satisfactorily to form a fine resist pattern, and at the same time, the occurrence of residue can be suppressed even after the development of the resist film. |
priorityDate | 2009-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 248.