http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100086944-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9638563b6cf2829449ccaebe6e48d219 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-364 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-08 |
| filingDate | 2010-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_881a722342ed837d986147f7db88efaf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b5f84f6ff1b7e78d715206c372a73af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b47c16149fab5b49fc5a907700c724d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c67cb906764ec77e8da5c51274881d78 |
| publicationDate | 2010-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100086944-A |
| titleOfInvention | Substrate Processing Equipment |
| abstract | (assignment) The present invention provides a substrate processing apparatus capable of improving processing accuracy by a low cost apparatus configuration. (Solution) A processing head 73 for performing a predetermined process at any place on the surface of the substrate K, and drive means 5, 74X, 74Y for relatively moving the substrate K and the processing head 73. And the substrate processing apparatus 1 which performs a predetermined or one-dimensional processing on the substrate K by moving the substrate K and the processing head 73 relative to each other, wherein the driving means 5, 74X, 74Y. ) Is provided with a storage means 92 for storing control data D3, D6X, D6Y for apparently accurate straightness, and the control data according to the relative movement of the substrate K and the processing head 73. Based on D3, D6X, and D6Y, the driving means 5, 74X, 74Y are corrected and driven. |
| priorityDate | 2009-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.