| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4efee27937b4a512f45809fed5293747 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J21-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-584 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-8892
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10784
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J37-349 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-889 |
| filingDate |
2008-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_415d57ce563a81adb03147de4bec91a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a458ba765e37bdbd6bbd57e5e465aa5b |
| publicationDate |
2010-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100080902-A |
| titleOfInvention |
Silicon tetrafluoride purification method |
| abstract |
Contacting the silicon tetrafluoride source gas with an ion exchange resin to remove acidic contaminants, contacting the silicon tetrafluoride source gas with a catalyst to remove carbon monoxide, removing carbon dioxide using an absorbent liquid, and cryogenic distillation. Purifying the silicon tetrafluoride source gas by treating the silicon tetrafluoride source gas with one or more purification processes comprising removing the inert compound by; Catalysts suitable for removing carbon monoxide from silicon tetrafluoride source gas; And methods for producing such catalysts are provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101452354-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10016724-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015111886-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101515117-B1 |
| priorityDate |
2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |