http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100077360-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2008-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822fba8f022bf5b848b847710aeb3924 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_455cda1b34ca6224ef599599324c5e17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4990571e55ab6ed19f29d66cb4f1a4ea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3daa66597d840c27147bedc59ec425f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02934cac50cc9bbe1988c1cf760bff18 |
| publicationDate | 2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100077360-A |
| titleOfInvention | CPM slurry composition for metal wire polishing and polishing method using the same |
| abstract | The present invention relates to a CMP slurry composition for polishing metal wires, and more particularly, to a CMP slurry composition comprising ultrapure water, an abrasive, an oxidizing agent, a metal complex, and a polymer compound, wherein the copolymerization ratio of acrylic acid and acrylamide is used as the polymer compound. The CMP slurry composition for metal wiring polishing characterized by using this acrylic acid-acrylamide copolymer of 1: 30-30: 1.n n n The CMP slurry composition of the present invention exhibits a high polishing rate with respect to the metal wiring, so that the polishing process time is short, and since there are few surface defects such as erosion, it is useful for the metal wiring polishing process. |
| priorityDate | 2008-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.