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publicationDate 2010-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20100075431-A
titleOfInvention MEMS display device and manufacturing method thereof
abstract MEMS devices include materials used in LCD or OLED manufacturing to facilitate manufacturing on the same manufacturing system. Where possible, the same or similar materials are used for multiple layers in the MEMS device, and the use of transparent conductors for partially transparent electrodes can be avoided, minimizing the number of materials needed and at the same time minimizing manufacturing costs. . Certain layers include alloys selected to achieve the desired properties. Intermediate treatment of the layers deposited during the manufacturing process can be used to provide a layer with the desired properties.
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