http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100073618-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4f1262bf89398faeaebaa19427cc573 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 2008-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8f1bae0980fb4d5a3e9e3458eee8257 |
| publicationDate | 2010-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100073618-A |
| titleOfInvention | SIO thin film heat treatment apparatus |
| abstract | The present invention relates to a heat treatment apparatus for a SiOC thin film, wherein a substrate coated with a SiOC thin film is positioned in a cylindrical tube chamber, and a tray for performing heat treatment on the SiOC thin film, an O-ring installed to seal the left and right sides of the tube chamber, the A heater disposed to surround the outside of the tube chamber to apply heat to the SiOC thin film in the tube chamber, and a temperature controller that generates heat by the heater and controls the heat applied to the SiOC thin film to form an insulating film having a low dielectric constant. In addition, as the relative density of carbon increases by increasing the density of the thin film, the effect of increasing the film strength can be simultaneously obtained. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109287126-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101379238-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109287126-B |
| priorityDate | 2008-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.