| abstract |
The present invention relates to a seed crystal assembly and a manufacturing method thereof, and includes a graphite thin plate, a seed crystal attached to one surface of the graphite thin plate by an adhesive, and a seed crystal holder attached to the other surface of the graphite thin plate and the adhesive.n n n According to the present invention, it is possible to prevent the occurrence of discontinuous defects such as macroscopic channels or pores between the seed crystal and the seed crystal holder, thereby growing a high quality silicon carbide single crystal. |