| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1b99970929f8bff8ffe5d7a42474f44b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12535 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2008-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a723b58e202ba1192ea677c00132054
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b410c2b17f2c5ef0ee874822191a1119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7b0d6ed53a9676733272f0cb258ca80 |
| publicationDate |
2010-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100068366-A |
| titleOfInvention |
Metal layer formation method, acoustic mirror structure formation method and acoustic mirror structure |
| abstract |
According to an exemplary embodiment, a method of forming a metal layer having reduced roughness includes forming a seed layer over a dielectric layer. The method further includes forming a metal layer over the seed layer. The seed layer causes the top surface of the metal layer to have a reduced thickness. The seed layer and the metal layer may be formed in the same process chamber or in different process chambers. Dielectric layers, seed layers and metal layers with reduced roughness may be used in the acoustic mirror structure. |
| priorityDate |
2007-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |