| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_021ebc8507967fb1cae5687eb8799eb4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4483 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2008-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42ad87b76d84f23a5ddc56114930fd9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_269306fd70d34992b1c0b4d1342cf405 |
| publicationDate |
2010-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100067936-A |
| titleOfInvention |
carburetor |
| abstract |
The present invention relates to a vaporizer, and more particularly, to a vaporizer which embeds a porous member inside the vaporizer to improve the vaporization efficiency of the liquid raw material.n n n The vaporizer according to the present invention is provided between the raw material supply device and the substrate deposition apparatus to vaporize the liquid raw material, the chamber providing an internal space in which the liquid raw material is vaporized, and the internal space of the chamber is introduced into the liquid raw material It includes a plurality of partitions divided along the direction to form at least one accommodating space and a plurality of porous members filled in the accommodating space saturated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101339600-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021101718-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200141310-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160099765-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101721681-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020176524-A |
| priorityDate |
2008-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |