| abstract |
The present invention provides organosilicates by treating an OSG film with a chemical, such as, but not limited to, an oxidant, exposing the OSG film to an energy source containing ultraviolet light, or treating the OSG film with a chemical and exposing the OSG film to an energy source. (OSG) relates to a method of removing some or all of the carbon-containing species inside a membrane.n n n Organosilicate, OSG membrane |