| abstract |
The present invention relates to an image sensor including a microlens array and a method of manufacturing the same, and gradually increases the aluminum composition ratio of the compound semiconductor as it moves away from the substrate, thereby growing the microlens formation layer, and then, the region adjacent to the substrate increases the oxidation rate. The slower and the further away from the substrate, the faster the oxidation rate, so that the interface between the oxidized and non-oxidized areas after the oxidation becomes a lens shape, and the thus formed lens is integrated into the image sensor. Lowering manufacturing costs, increasing the signal-to-noise ratio and resolution of the image sensor, and improving the sensitivity at the same time. |