| abstract |
The present invention relates to an ion analyzer, and more particularly, to an ion analyzer for analyzing the properties of ions using the physical properties (mass, charge, movement speed, etc.) of the incident ions, the present invention relates to an ion incident device, Some of the incident ions hit and some of the ions are formed so as to pass through the first ion to analyze the characteristics of the ion using a flash generating member for emitting a flash when the ions hit, the flash emitted from the flash generating member It provides a complex ion analyzer including an analyzer, and a second ion analyzer for analyzing the characteristics of the ions passing through the scintillation generating member.n n n According to the present invention, when measuring the energy of ions, it is possible to analyze them in real time using the flight time of ions, which can significantly shorten the time required for the experiment compared to the conventional method, and also, the type of ions. Also, it is possible to analyze and obtain measured values with improved reliability as compared with the conventional art. |