http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100053639-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2008-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_caa44e16ee81b9ec580a8325ace6080b |
| publicationDate | 2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100053639-A |
| titleOfInvention | Exhaust system structure of film forming apparatus, film forming apparatus and exhaust gas processing method |
| abstract | The exhaust system structure of the film forming apparatus according to the present invention includes an exhaust pipe 51 for discharging exhaust gas in the processing container 11, an automatic pressure controller 52 provided in the vicinity of the processing container 11 of the exhaust pipe 51, and A vacuum pump 54 provided downstream of the automatic pressure controller 52 of the exhaust pipe 51, an oxidant supply unit 57 for supplying an oxidant to a downstream position of the automatic pressure controller 52 of the exhaust pipe 51; A trap mechanism 53 provided at a downstream side of the oxidant supply position of the exhaust pipe 51 to recover a product generated by the reaction of the organic metal source gas component and by-products in the exhaust gas with the oxidant, and the exhaust pipe 51. And a decontamination device 55 provided downstream of the trap mechanism 53. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102250066-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200092883-A |
| priorityDate | 2007-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.