| abstract |
It is one of the problems to provide a highly reliable semiconductor device having a thin film transistor having stable electrical characteristics. In addition, it is one of the problems to manufacture a highly reliable semiconductor device with low cost and productivity.n n n In a semiconductor device having a thin film transistor, the semiconductor layer of the thin film transistor is an oxide semiconductor layer to which a metal element is added. As the metal element, at least one metal element of iron, nickel, cobalt, copper, gold, molybdenum, tungsten, niobium, and tantalum is used. The oxide semiconductor layer also includes indium, gallium, and zinc. |