abstract |
Provided is a photoacid generator capable of generating an acid with good efficiency with respect to energy absorbed, having excellent developability, capable of forming a fine pattern, and a cationic polymerization initiator having excellent curability, and further, a resist composition and a cation using them. It provides a polymerization composition. Aromatic sulfonium salt compound represented by the following general formula (I): (In the general formula (I), E 1 to E 4 are each independently a substituent represented by the following general formula (II) or the following general formula (III): ) In the general formula (I), a compound in which r and s is 0, a compound in which m and n are 0, or a compound in which n and r are 0 are preferable, and in the general formula (I), any one of m and s More preferred are compounds having 1. |