http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100044706-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2009-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e432e03d83281a7953d3188091956c0e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed3c4bef2ce802a600b9fe85c40e4ed1 |
| publicationDate | 2010-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100044706-A |
| titleOfInvention | SOI substrate and its manufacturing method |
| abstract | An SOI substrate having excellent mechanical strength and a method of manufacturing the same are provided. By irradiating the accelerated hydrogen ions to the single crystal semiconductor substrate, an embrittlement region is formed in a predetermined depth region from the surface of the single crystal semiconductor substrate, the single crystal semiconductor substrate and the base substrate are bonded through an insulating layer, and the single crystal semiconductor substrate is heated, By separating the embrittlement region as a boundary, at least one of nitrogen, oxygen, or carbon is formed when the semiconductor layer is formed on the base substrate through the insulating layer, and the surface of the semiconductor layer is melted by irradiating laser light on the surface of the semiconductor layer. Is employed in the semiconductor layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130129897-A |
| priorityDate | 2008-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.