| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00 |
| filingDate |
2003-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_050440a29423592d516e200f9e73e692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51b9842b268518ce4b1f4132273b83e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bfd3f6336b36b2fd4cf88b5debaf4be |
| publicationDate |
2010-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100034062-A |
| titleOfInvention |
Method for producing ruthenium compound and metal ruthenium film |
| abstract |
The present invention provides a ruthenium compound capable of obtaining a good quality metallic ruthenium and a method for producing a metallic ruthenium film by chemical vapor deposition using the same. The ruthenium compound which is the chemical vapor growth material of this invention is represented by following General formula (1), for example. <Formula 1> |
| priorityDate |
2002-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |