http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100030000-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2873 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-34 |
filingDate | 2008-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f69fa0da61f580b1519ec08668f9bf36 |
publicationDate | 2010-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20100030000-A |
titleOfInvention | Method of Preparation of Analytical Samples for Transmission Electron Microscopy |
abstract | The present invention relates to a method for manufacturing an analytical sample for transmission electron microscopy, and a technical problem to be solved is to deposit platinum of a predetermined thickness with platinum gas on an analytical analysis sample, thereby preventing electron charging during an analysis of transmission electron microscopy, and By cleaning the surface of an analytical sample using an ion beam of energy, it is possible to obtain a high quality transmission electron microscope image by removing the altered membrane on the analytical sample surface.n n n To this end, the present invention provides an analytical sample cutting step of cutting an analytical sample from a substrate, a focused ion beam processing step of processing both sides of an analytical sample into a focused ion beam such that the analytical sample becomes a thin film, and a platinum deposition step of depositing platinum on the analytical sample. And an ion beam milling step of milling both surfaces of the analytical sample with a first ion beam to remove platinum. |
priorityDate | 2008-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.