http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100029626-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6928a4722175b6afaf60db3754437c7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2008-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b94cecb3d583bc61cea11f39aa77c15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37b18b77f56420f7ad00c31857b9dc8d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5914555e530ff3e12de179a71a487bff |
| publicationDate | 2010-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100029626-A |
| titleOfInvention | Substrate Surface Treatment Apparatus and Method Using Trimethylchlorosilane Vapor |
| abstract | The present invention relates to a device and a method for changing the surface characteristics of a substrate using a trimethylclorosilane (TMCS) vapor in a semiconductor manufacturing process or a display device manufacturing process, and in particular, the substrate and TMCS in a container that can control the degree of vacuum Install a small container that can hold, place a TMCS drop in the container, and use TMCS vapor to change the surface of the substrate to the desired surface energy state by varying the pressure, temperature and processing time inside the container. Provided are a substrate surface treatment apparatus and a substrate surface treatment method using TMCS vapor. |
| priorityDate | 2008-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.