abstract |
Mn-containing alloy film or CuMn by heat treatment (CVD or ALD) on the surface of the workpiece using Mn-containing source gas (or Mn-containing source gas and Cu-containing source gas) and oxygen-containing gas (for example, water vapor) as the processing gas. A containing metal alloy film is formed. According to this, it is possible to form a Mn containing alloy film or a CuMn containing metal alloy film with high step coverage in the fine recessed part formed in the to-be-processed object surface. |