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filingDate 2008-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2fe1162daf6d07ab726fd65e127d8d4
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publicationDate 2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20100024404-A
titleOfInvention Deposition Method and Deposition Device
abstract Mn-containing alloy film or CuMn by heat treatment (CVD or ALD) on the surface of the workpiece using Mn-containing source gas (or Mn-containing source gas and Cu-containing source gas) and oxygen-containing gas (for example, water vapor) as the processing gas. A containing metal alloy film is formed. According to this, it is possible to form a Mn containing alloy film or a CuMn containing metal alloy film with high step coverage in the fine recessed part formed in the to-be-processed object surface.
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