| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b31896b0595e5629c470c80b74b2d2e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3e9059c03350380e5577b50d44e3f4b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9031f2f872e6ad2d641f0f99c9e4cf7b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0015 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2008-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1714bfec6736f7b4b42a6113444debba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0419f8ebc2c60a42eeabbeac49a40ee2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_feb23ea16c1ff2aa20b2b804c4845602
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd86b75e6085c6c38a4f7c25e097c97e |
| publicationDate |
2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100023215-A |
| titleOfInvention |
Ultrafine pattern formation method using organometallic solution |
| abstract |
An ultrafine pattern formation method using an organometallic solution is provided. The ultrafine pattern forming method includes forming a transfer layer on a substrate. The organometallic solution forming the transfer layer contains a metal complex compound obtained by reacting a metal or a metal compound with an ammonium compound. The transfer layer is pressed using a stamp having a pattern having an uneven structure and the substrate having the transfer layer is heated to form a conductive pattern having a pattern corresponding to the recess of the stamp. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101237849-B1 |
| priorityDate |
2008-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |