abstract |
The present invention includes a rotor 16 having one or more cylindrical portions 26, wherein one or more wiping blades 32, 33, 34, 35, 36, 41 on the cylindrical portion. ), Wherein the wiping blade comprises two or more teeth 42, 43, 44, 42 ', 43', 44 ', wherein the teeth are spaced apart from each other to form a gap The processing apparatus 8, wherein the thin film processing apparatus has an average ratio V between the length L of one tooth portion 41 and the length G of the gap located adjacent to the tooth portion 2: 2. It is characterized by being larger. |