| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b31896b0595e5629c470c80b74b2d2e4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-2256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-22 |
| filingDate |
2010-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9c9452b4b85e41cee07ba9b014fbe2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a53a3c36d9cf2d5d5bb2c04f2ed6e2d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54f8af2e3c69e8612b0b56f0f1df5793 |
| publicationDate |
2010-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100020501-A |
| titleOfInvention |
Low dielectric plasma polymer thin film and method for manufacturing same |
| abstract |
TECHNICAL FIELD The present invention relates to a low dielectric plasma polymer thin film and a method of manufacturing the same, and more particularly, to a low dielectric plasma polymer thin film and plasma enhanced chemical vapor deposition (PECVD) deposition and RTA prepared using a linear or organic precursor material. It relates to a method for producing the low dielectric plasma polymer thin film through a post heat treatment using an apparatus. The low dielectric plasma polymer thin film according to the present invention is thermally very stable and has a low dielectric constant and is formed in a thin film structure having excellent mechanical properties, which is effective in producing a metal multilayer thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9371430-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101416558-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101506801-B1 |
| priorityDate |
2010-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |